GaPO4、langasite和LiNbO3在表面声波微器件中的应用比较研究

P. Schiopu, I. Cristea, N. Grosu, A. Craciun
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引用次数: 4

摘要

表面声波器件在电信号处理方面的效率和通用性已经得到了广泛的认可。铌酸锂(LiNbO3)、Langasite (LGS)、镧镓硅酸盐(La3Ga5SiO14)和正磷酸镓(GaPO4)等压电材料在工业应用中的实际进展,使制造出具有克服石英晶体限制的性能的器件成为可能。SAW微设备最重要的应用之一是被动无线询问系统。今天,具有其特性的GaPO4是迄今为止最适合用于高温下机器监测和压力测量的传感器应用的压电材料。基于GaPO4的SAW微器件在高达800°C的温度下工作。本文对声表面波微器件的实际发展水平作了简要介绍。我们讨论了我们的研究作为GaPO4, Langasite和LiNbO3的比较研究,关于它们的性质。每个都有独特的优点和缺点,在不同的应用中具有优势。在工作的最后,提出了关于新型材料SAW传感器器件发展趋势的结论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparative study of GaPO4, langasite, and LiNbO3 properties with application in Surface Acoustic Waves microdevices
The results of research into Surface Acoustic Wave — SAW — devices have been recognized for their efficiency and versatility in the electrical signals processing. Actual progress in the industrial application of piezoelectric materials such as Lithium Niobate (LiNbO3), Langasite (LGS), Lanthanum-Gallium Silicate La3Ga5SiO14 and Gallium Orthophosphate (GaPO4), allows the manufacturing of devices with performances, which overcome the limits obtained with quartz crystals. One of the most important applications of SAW microdevices is passively, wirelessly interrogating systems. Today, GaPO4 with its properties is by far the best suited piezoelectric material to be used in sensor applications for machine monitoring and pressure measurements, at high temperatures. SAW microdevices based on GaPO4 operate at temperatures of up to 800°C. In this paper is presented a short introduction regarding the actual level of SAW microdevices development. We discuss our investigations as a comparative study of GaPO4, Langasite, and LiNbO3, regarding their properties. Each has unique strengths and weaknesses giving advantages in different applications. Conclusions regarding trends in the development of SAW sensor devices with novel materials are presented in the end of the work.
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