绝缘体上硅集成波导转动镜的制备

First IEEE International Conference on Group IV Photonics, 2004. Pub Date : 1900-01-01 DOI:10.1109/GROUP4.2004.1416715

Wenhui Wang, Yanzhe Tang, Yirong Yang, Tie Li, Yaming Wu, Jianyi Yang, Yuelin Wang

{"title":"绝缘体上硅集成波导转动镜的制备","authors":"Wenhui Wang, Yanzhe Tang, Yirong Yang, Tie Li, Yaming Wu, Jianyi Yang, Yuelin Wang","doi":"10.1109/GROUP4.2004.1416715","DOIUrl":null,"url":null,"abstract":"In this paper, based on the inductively coupled plasma (ICP) etching and KOH wet etching techniques, the fabrication of integrated waveguide turning mirror (IWTMs) is presented.","PeriodicalId":299690,"journal":{"name":"First IEEE International Conference on Group IV Photonics, 2004.","volume":"151 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Fabrication of integrated waveguide turning mirror on silicon-on-insulator\",\"authors\":\"Wenhui Wang, Yanzhe Tang, Yirong Yang, Tie Li, Yaming Wu, Jianyi Yang, Yuelin Wang\",\"doi\":\"10.1109/GROUP4.2004.1416715\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, based on the inductively coupled plasma (ICP) etching and KOH wet etching techniques, the fabrication of integrated waveguide turning mirror (IWTMs) is presented.\",\"PeriodicalId\":299690,\"journal\":{\"name\":\"First IEEE International Conference on Group IV Photonics, 2004.\",\"volume\":\"151 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"First IEEE International Conference on Group IV Photonics, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/GROUP4.2004.1416715\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"First IEEE International Conference on Group IV Photonics, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2004.1416715","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

本文介绍了基于电感耦合等离子体刻蚀和KOH湿刻蚀技术的集成波导旋转反射镜的制备方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication of integrated waveguide turning mirror on silicon-on-insulator

In this paper, based on the inductively coupled plasma (ICP) etching and KOH wet etching techniques, the fabrication of integrated waveguide turning mirror (IWTMs) is presented.

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First IEEE International Conference on Group IV Photonics, 2004.

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