氮化铝薄膜谐振器拓扑结构在天线和传感器中的应用

1992 IEEE Microwave Symposium Digest MTT-S Pub Date : 1992-06-01 DOI:10.1109/MWSYM.1992.187934

R. Weber, S. Burns, C. Campbell, R. O'Toole

{"title":"氮化铝薄膜谐振器拓扑结构在天线和传感器中的应用","authors":"R. Weber, S. Burns, C. Campbell, R. O'Toole","doi":"10.1109/MWSYM.1992.187934","DOIUrl":null,"url":null,"abstract":"The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.<<ETX>>","PeriodicalId":165665,"journal":{"name":"1992 IEEE Microwave Symposium Digest MTT-S","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Applications of AlN thin-film resonator topologies as antennas and sensors\",\"authors\":\"R. Weber, S. Burns, C. Campbell, R. O'Toole\",\"doi\":\"10.1109/MWSYM.1992.187934\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.<<ETX>>\",\"PeriodicalId\":165665,\"journal\":{\"name\":\"1992 IEEE Microwave Symposium Digest MTT-S\",\"volume\":\"31 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1992 IEEE Microwave Symposium Digest MTT-S\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MWSYM.1992.187934\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1992 IEEE Microwave Symposium Digest MTT-S","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.1992.187934","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 5

摘要

本文报道了薄膜谐振器(TFR)技术在微波中的两种新应用。第一个应用是使用tfr阵列作为晶圆上相控阵天线;第二种是具有纳米级灵敏度的气体和化学质量传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Applications of AlN thin-film resonator topologies as antennas and sensors

The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.<>

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

1992 IEEE Microwave Symposium Digest MTT-S

自引率

0.00%

发文量