一种包含微激光编码器的加速度计，用于宽测量范围[用于地震探测]

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879667

R. Sawada, E. Higurashi, T. Itoh

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引用次数: 3

摘要

试制了两种可测量大范围加速度的小型高灵敏度加速度计。加速度计包含一个光学线性微激光编码器。由于编码器可以测量连接在具有地震质量的平行双板悬臂上的长线性光栅刻度的相对位移，因此可测量范围是无限的。

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An accelerometer incorporating a micro-laser encoder for a wide measurable range [for earthquake detection]

Two types of small and highly sensitive accelerometers that can measure a wide range of acceleration have been tentatively developed. The accelerometer incorporates an optical linear-micro-laser encoder. The measurable range is unlimited because the encoder can measure relative displacement to a long linear grating scale attached to a parallel two-plate cantilever with a seismic mass.

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2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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