球面测试用干涉测量系统测量小非球面

Nam-Young Jang, P. Choi, J. Eun
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引用次数: 0

摘要

利用非球面分析算法,研制了一种基于菲索型移相干涉仪的小非球面检测系统。对非球面的测量结果与传统的非球面检测系统进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of small aspheric surface using interferometric system for spherical surface test
Using the aspheric analysis algorithm, a Fizeau-type phase shifting interferometer (FPSI)-based spherical surface testing system is developed for analyzing small aspheric surface. Measurement result of an aspheric surface is compared to the conventional aspheric testing system.
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