{"title":"聚酰亚胺薄膜的介电性能","authors":"R. Rusu, M. Damaceanu, M. Brumǎ, A. Muller","doi":"10.1109/SMICND.2010.5650658","DOIUrl":null,"url":null,"abstract":"Heterocyclic polyimides based on bis (ketonaphthalic) dianhydrides and aromatic diamines containing oxadiazole rings were prepared and their dielectric properties were investigated. The dielectric constant values, measured at room temperature and in the frequency domain of 1 Hz-1MHz, were in the range of 2.7–3.1, being lower or comparable with those of commercial polyimide film Kapton which is one of the most used dielectric materials in microelectronic applications. The dielectric loss values are also low, in the same range with those of Kapton.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Dielectric properties of thin polyimide films\",\"authors\":\"R. Rusu, M. Damaceanu, M. Brumǎ, A. Muller\",\"doi\":\"10.1109/SMICND.2010.5650658\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Heterocyclic polyimides based on bis (ketonaphthalic) dianhydrides and aromatic diamines containing oxadiazole rings were prepared and their dielectric properties were investigated. The dielectric constant values, measured at room temperature and in the frequency domain of 1 Hz-1MHz, were in the range of 2.7–3.1, being lower or comparable with those of commercial polyimide film Kapton which is one of the most used dielectric materials in microelectronic applications. The dielectric loss values are also low, in the same range with those of Kapton.\",\"PeriodicalId\":377326,\"journal\":{\"name\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2010.5650658\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650658","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Heterocyclic polyimides based on bis (ketonaphthalic) dianhydrides and aromatic diamines containing oxadiazole rings were prepared and their dielectric properties were investigated. The dielectric constant values, measured at room temperature and in the frequency domain of 1 Hz-1MHz, were in the range of 2.7–3.1, being lower or comparable with those of commercial polyimide film Kapton which is one of the most used dielectric materials in microelectronic applications. The dielectric loss values are also low, in the same range with those of Kapton.
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