用于滤波器调谐的CMOS-MEMS新型谐振器

2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS) Pub Date : 2015-10-01 DOI:10.1109/MWSCAS.2015.7282017

H. Goktas, M. Zaghloul

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引用次数: 2

摘要

本文提出了一种新型的MEMS谐振器，并采用CMOS工艺设计。制作并测试了这些装置。该工作展示了CMOS和MEMS相结合的工艺。谐振器采用固定-固定梁结构设计。应用于低功耗温度调谐滤波器和温度传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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CMOS-MEMS novel resonator for filter tuning

Novel MEMS resonators are presented in this work, and were designed in CMOS process. The devices were fabricated and tested. The work shows the combined CMOS and MEMS process. The resonators are designed in Fixed -Fixed beam structure. Applications are low power temperature tuning filters, and temperature sensors.

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来源期刊

2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS)

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