{"title":"脉冲激光沉积薄膜生长预测及参数变化对工艺过程的影响","authors":"E. Pankratov","doi":"10.18642/ijamml_710012238","DOIUrl":null,"url":null,"abstract":"In this paper, we consider an analytical approach for analyzing film growth by pulsed laser deposition. The approach gives a possibility to analyzed the considered technological in more common case. The influence of the parameters of the growth process on the growth of films is investigated.","PeriodicalId":405830,"journal":{"name":"International Journal of Applied Mathematics and Machine Learning","volume":"116 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"On Prognosis of Growth of Film by Pulsed Laser Deposition and Influence of Variation of Parameters on Technological Process\",\"authors\":\"E. Pankratov\",\"doi\":\"10.18642/ijamml_710012238\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we consider an analytical approach for analyzing film growth by pulsed laser deposition. The approach gives a possibility to analyzed the considered technological in more common case. The influence of the parameters of the growth process on the growth of films is investigated.\",\"PeriodicalId\":405830,\"journal\":{\"name\":\"International Journal of Applied Mathematics and Machine Learning\",\"volume\":\"116 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Applied Mathematics and Machine Learning\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.18642/ijamml_710012238\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Applied Mathematics and Machine Learning","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.18642/ijamml_710012238","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On Prognosis of Growth of Film by Pulsed Laser Deposition and Influence of Variation of Parameters on Technological Process
In this paper, we consider an analytical approach for analyzing film growth by pulsed laser deposition. The approach gives a possibility to analyzed the considered technological in more common case. The influence of the parameters of the growth process on the growth of films is investigated.
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