辅导课4C -压电传感器作为电子/电气器件

F. Josse
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引用次数: 0

摘要

本教程将介绍基于压电晶体的器件,并用于材料表征和传感器应用。各种声波装置用于物理和生物化学传感应用将被提出和描述。然后,课程将重点介绍两种已经达到一定成熟程度的压电传感器——可作为商业产品或正在开发中。它们是厚度剪切模式(TSM)谐振器和表面声波(SAW)设备(包括瑞利SAW和剪切水平SAW),用于气相和/或液相的传感。将描述具有选择性吸收涂层的装置。将给出传感器设备的电子/电气特性。传感器装置的原理,设计参数,工作特性,和关键的传感参数将被涵盖。将描述与压电传感器一起使用的各种测量方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Tutorial Session 4C - Piezoelectric Sensors as Electronic/electrical Devices
This tutorial will cover devices based on piezoelectric crystals and used for materials characterization and sensor applications. Various acoustic wave devices used for physical and bio-chemical sensing applications will be presented and described. The course will then focus on two types of piezoelectric sensors that have reached some level of maturity – available as commercial products or under development. They are the thickness shear mode (TSM) resonators and surface acoustic wave (SAW) devices (both Rayleigh SAW and shear horizontal-SAW) used for sensing in gas and/or liquid phase. Devices with selective absorptive coatings will be described. The electronic/electrical characteristics of the sensor devices will be given. Sensor device principles, design parameters, operating characteristics, and key sensing parameters will be covered. Various measurement schemes used with the piezoelectric sensors will be described.
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