小型电子能谱仪能量分析仪的电子光学方案

Zh.T. Kambarova, A. Saulebekov, K. Kopbalina
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引用次数: 0

摘要

提出了一种基于多极电极系统的轴对称静电反射式带电粒子束能量分析仪的电子光方案。能量分析仪的场设计为基柱场的叠加和基场的八极圆同轴组合。采用数值方法对光电系统的轨迹进行了分析。计算了系统的微粒光学参数。建立了“环-环”型三阶角聚焦方案。该能量分析仪结构紧凑,具有较高的粒子光学参数。计算了该装置的仪器功能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The electron-optical scheme of the energy analyzer of small-sized electron spectrometer
The electron-optical scheme of the axially-symmetric electrostatic mirror-type energy analyzer of charged particles beam based on a multipole electrode system is proposed. The field of the energy analyzer is designed as a superposition of the base cylindrical field and set of circular octupole coaxial with base field. The trajectory analysis of the electron-optical system was carried out by a numerical method. Corpuscular-optical parameters of system are calculated. The “ring-ring” type third-order angular focusing scheme is found. The proposed energy analyzer has compactness and high corpuscular-optical parameters. The instrumental function of device is calculated.
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