基于扫描探针显微镜的锗成分纳米图案化

2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials Pub Date : 2007-08-20 DOI:10.1109/SIBEDM.2007.4292918

K. Astankova, E. B. Gorokhov, D. Sheglov, V. Volodin, A. Latyshev, A. L. Aseev

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摘要

首次证明了通过扫描探针显微镜对GeO薄膜进行修饰，可以形成横向分辨率高达几纳米的ge基纳米线。使用过的氧化锗薄膜的主要优点是在原子力显微镜探针的作用下具有亚稳定性和对Ge和GeO2的分解。

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Nano-Pattering on the Basis of Germanium Compositions Using Scanning Probe Microscopy

The possibility of formation of Ge-based nanowires with lateral resolution up to several nanometers using modification of GeO films by scanning probe microscope was demonstrated for the first time. The main advantage of used germanium monoxide films is its meta-stability and decomposition on Ge and GeO2 under impact of atomic force microscope probe.

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2007 8th Siberian Russian Workshop and Tutorial on Electron Devices and Materials

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