基于MEMS法布里-珀罗干涉仪的光谱仪演示器，波长范围为7.5 μm至9.5 μm

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI:10.1117/12.2036272

J. Mäkynen, M. Tuohiniemi, A. Näsilä, R. Mannila, J. Antila

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引用次数: 8

摘要

芬兰VTT技术研究中心开发了一种波长范围为7.5 μm ~ 9.5 μm的MEMS法布里-珀罗干涉仪(FPI)。该器件由两个分布式布拉格反射器(DBR)组成，采用MEMS加工技术制造。透射峰的全宽半最大值为150nm。通过施加0 V至30 V的控制电压，可以将传输峰值从7.5 μm调谐到9.5 μm。一个实验室演示器已经放在一起，以显示该模块作为光谱测量装置的一部分的使用。用该装置测量了几种气体样品，并与文献中发现的测量结果进行了比较。

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MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 μm to 9.5 μm wavelength range

VTT Technical research centre of Finland has developed a MEMS Fabry-Perot interferometer (FPI) for the wavelength range from 7.5 μm to 9.5 μm. The device consists of two Distributed Bragg Reflectors (DBR) manufactured with MEMS processing techniques. The full width half maximum of the transmission peak is 150nm. This transmission peak can be tuned from 7.5 μm to 9.5 μm by applying a control voltage from 0 V to 30 V. A laboratory demonstrator has been put together to show the use of this module as a part of a spectral measurement setup. Several gas samples have been measured with the setup and compared against measurement results found in literature.

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Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components

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