{"title":"用于同时检测压力和气体成分的热电堆MEMS传感器瞬态响应研究的解析建模方法","authors":"D. Randjelović","doi":"10.1109/SMICND.2018.8539826","DOIUrl":null,"url":null,"abstract":"This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.","PeriodicalId":247062,"journal":{"name":"2018 International Semiconductor Conference (CAS)","volume":"589 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition\",\"authors\":\"D. Randjelović\",\"doi\":\"10.1109/SMICND.2018.8539826\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.\",\"PeriodicalId\":247062,\"journal\":{\"name\":\"2018 International Semiconductor Conference (CAS)\",\"volume\":\"589 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Semiconductor Conference (CAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2018.8539826\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2018.8539826","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition
This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.
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