非零干涉仪非球面检测部分补偿透镜的对准方法

Tu Shi, Yongying Yang, Lei Zhang, Dong Liu, Yangjie Chen
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引用次数: 0

摘要

在干涉测试中,光学元件的仔细对准是必不可少的。关键元件的不对准严重影响检测精度。对于非球面图形误差检测,非零测试比零测试更灵活、更经济。但是,由于违反null配置而引起的回溯误差使对齐变得困难。在非球面部分补偿测试中,作为关键部件的部分补偿透镜(PCL)需要仔细调整。采用可移动透镜将PCL作为平面组合在一起,对PCL进行高精度调整,是一种有效的平面对准方法。但它的结构很复杂。在此基础上,提出了一种基于射线追踪软件系统建模的PCL计算机辅助对准方法。用计算机计算简化了结构。根据探测器上波前彗差的线性关系,PCL的倾斜和离心可以很容易地分别对准平面镜和标准球面镜。利用这两种方法在非球面部分补偿检测实验装置上实现了PCL的对准。调整和非球面测试结果依次给出。CAA方法是一种广义的方法,结构更简单,而平面对准方法易于实现,适合工业应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Alignment methods for partial compensating lens of aspheric testing in a non-null interferometer
Careful alignment of optical elements is essential in interferometric tests. Misalignments of the key element largely influence the testing accuracy. For aspheric figure error testing, non-null tests achieve more flexible and economical measurements than the null ones. However, retrace error is induced due to the violation of null configuration, making the alignment difficult. In aspheric partial compensation testing, the partial compensating lens (PCL) as the key component needs careful adjustment. The aplanat alignment method is effective for the PCL adjusting with high accuracy employing a removable lens, which combined with the PCL as an aplanat. But its structure is complex. After describing this method, a PCL computer-aided alignment (CAA) method is posed basing on system modeling in a ray tracing software. The structure is simplified with computer calculations. The PCL tilt and decentration are easily aligned with a plane and a standard spherical mirror respectively, according to linear relations with wavefront coma aberrations on the detector. Alignment of the PCL was implemented with these two methods in an aspheric partial compensation testing experimental apparatus. Adjustment and aspheric testing results were presented in order. The CAA method is a generalized approach with simpler structure, while the aplanat alignment method is easy to carry out and suitable for industrial application.
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