金表面等离子体天线SOI光电二极管的指向性

Anitharaj Nagarajan, Shusuke Hara, H. Satoh, A. Panchanathan, H. Inokawa
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引用次数: 3

摘要

本文研究了带有金(Au)光栅型表面等离子体(SP)天线的绝缘体上硅(SOI)光电二极管(PD)入射光的方向性。当天线发出的绕射光与SOI中传播波的相位匹配条件满足时,光敏度得到提高,从而实现入射角检测。由于PD与互补金属氧化物半导体(CMOS)集成电路技术兼容,该结果可能开辟一个新的领域,即将角度敏感像素(asp)集成在芯片中,用于无透镜成像等应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Directivity of SOI Photodiode with Gold Surface Plasmon Antenna
This paper demonstrates the directivity for incoming light of silicon-on-insulator (SOI) photodiode (PD) with gold (Au) grating type surface plasmon (SP) antenna. Light sensitivity is enhanced when the phase matching condition between the diffracted light from the antenna and propagating wave in the SOI is satisfied, and therefore incident angle detection can be realized. Since the PD is compatible with complementary metal-oxide-semiconductor (CMOS) integrated circuit technology, the results may open up a new field of angle sensitive pixels (ASPs) integrated in a chip for applications such as lensless imaging.
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