低温等离子体处理稳定性分析

2022 6th Scientific School Dynamics of Complex Networks and their Applications (DCNA) Pub Date : 2022-09-14 DOI:10.1109/DCNA56428.2022.9923238

B. Brzhozovskii, V. Martynov, E. Zinina, S. Permyakov

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引用次数: 1

摘要

介绍了低温等离子体处理工艺稳定性分析的结果。通过观察等离子体云光强度信号的行为，可以监测等离子体云光的稳定性损失。

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Analysis of the low-temperature plasma treatment stability

The results of the process stability analysis of low-temperature plasma treatment are presented. It has been established that the stability loss can be monitored by the results of observing the behavior of the plasma cloud glow intensity signal.

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来源期刊

2022 6th Scientific School Dynamics of Complex Networks and their Applications (DCNA)

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