一种使用单晶硅的超小型高性能硅麦克风

2005 Digest of Technical Papers. International Conference on Consumer Electronics, 2005. ICCE. Pub Date : 2005-05-16 DOI:10.1109/ICCE.2005.1429826

T. Tajima, Y. Iguchi, M. Goto, K. Ono, A. Ando, K. Tanioka, F. Takeshi, S. Matsunaga, Y. Yasuno

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引用次数: 0

摘要

我们开发了一种超小型高性能电容器型硅麦克风的原型，采用独特的半导体微加工技术，使用极高的拉伸强度单晶硅，具有大批量生产和出色的可靠性。我们制造的麦克风具有30 Hz至20 kHz的宽频率范围、超过-42 dB的灵敏度和134 dB/sub SPL/的宽动态范围等声学特性，足以用于广播和消费者使用。

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An ultra-small high-performance silicon microphone using single-crystalline silicon

We have developed a prototype of an ultra-small high-performance condenser-type silicon microphone with a unique semiconductor microfabrication technology using extremely high-tensile-strength single-crystalline silicon, having both mass producibility and outstanding reliability. The microphone we fabricated has such acoustic characteristics as a wide frequency range of 30 Hz to 20 kHz, sensitivity of over -42 dB, and wide dynamic range of 134 dB/sub SPL/, sufficient for broadcasting and consumer use.

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来源期刊

2005 Digest of Technical Papers. International Conference on Consumer Electronics, 2005. ICCE.

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