Y. Mei, G. Siu, R. Fu, P. Chu, J. Zhai, Y.J. Wang, O. Tsui, Z. Tang, J.J. Shi, M. Kong
{"title":"纳米mos阵列:金属碳纳米结构与硅衬底上绝缘氧化铝纳米通道内的纳米sio2岛连接","authors":"Y. Mei, G. Siu, R. Fu, P. Chu, J. Zhai, Y.J. Wang, O. Tsui, Z. Tang, J.J. Shi, M. Kong","doi":"10.1109/NANOEL.2006.1609760","DOIUrl":null,"url":null,"abstract":"A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands inside Insulated Alumina Nanochannels on Silicon Substrate\",\"authors\":\"Y. Mei, G. Siu, R. Fu, P. Chu, J. Zhai, Y.J. Wang, O. Tsui, Z. Tang, J.J. Shi, M. Kong\",\"doi\":\"10.1109/NANOEL.2006.1609760\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.\",\"PeriodicalId\":220722,\"journal\":{\"name\":\"2006 IEEE Conference on Emerging Technologies - Nanoelectronics\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 IEEE Conference on Emerging Technologies - Nanoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANOEL.2006.1609760\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANOEL.2006.1609760","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands inside Insulated Alumina Nanochannels on Silicon Substrate
A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.