抗反射涂层对硅光谐振生物传感器的影响

2019 2nd International Symposium on Devices, Circuits and Systems (ISDCS) Pub Date : 2019-03-01 DOI:10.1109/ISDCS.2019.8719100

J. Maeda, Riku Funamoto, Y. Amemiya, S. Yokoyama

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引用次数: 0

摘要

我们使用硅谐振器制造生物传感器来检测生物材料。由法布里-珀罗共振引起的波纹是一个大问题。为了抑制这种现象，我们将抗反射涂层应用于生物传感器器件，并检测其效果。

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Effect of Anti-Reflective Coating for Si Optical Resonator Biosensors

We fabricated biosensors using silicon resonators for detection of biomaterials. The ripple caused by Fabry-Perot resonance is one of the big problems. In order to suppress this phenomenon, we applied the anti-reflective coating to the biosensor devices and examined its effect.

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2019 2nd International Symposium on Devices, Circuits and Systems (ISDCS)

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