Test structures for continuous determination of electrical parameters of substrate material up to 79 GHz

This paper describes the use of line resonator and as well as micro strip line for continuous monitoring of electrical properties of substrate material. On the basis of a high frequency substrate, a method for determination of the electrical material parameter in a frequency range of 5 GHz to at least 79 GHz is presented. On focus are the relative permittivity, /spl epsiv//sub r/, and the dissipation factor, tan/spl delta/. High frequency measurements are compared to simulation results. Finally, the extracted material parameters are presented and discussed. Both methods are compared to each other concerning accuracy and sensitivity.