基于LiTaO3/SiO2结构的爱波传感器实验研究

Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications Pub Date : 2014-12-29 DOI:10.1109/SPAWDA.2014.6996811

Gui Chen, Xiao Xie, Wen Wang, Shitang He

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引用次数: 1

摘要

在10°C到60°C范围内，给出了二氧化硅涂层Love波振荡器的温度特性。在36°YX-LiTaO3衬底上制备了表面掠掠体波(SSBW)和Love波延迟线器件。在150MHz范围内，从10°C到60°C的sio2涂层Love波振荡器的TCF接近于零。在检测二甲基膦酸盐(DMMP)的气体传感器实验中，制备的sxfa包被化学传感器具有良好的阈值检测限和较高的灵敏度。

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An experimental research of love wave sensor based on LiTaO3/SiO2 structure

Temperature characteristics of SiO₂-coated Love Wave oscillators are presented from 10 °C to 60 °C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 °YX-LiTaO₃ substrate. Near zero TCF of SiO₂-coated Love Wave oscillators from 10 °C to 60 °C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited a threshold detection limit and high sensitivity.

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Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications

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