基于电荷的块体finfet紧凑模型

A. Cerdeira, M. Estrada, R. Ritzenthaler, J. Franco, M. Togo, C. Claeys
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引用次数: 1

摘要

多栅极mosfet被广泛认为是最具发展前途的纳米晶体管。因此,这些器件在低电压、低功耗模拟和数字应用方面具有巨大的潜力。在块状晶圆上制造的finfet因其与标准块状CMOS技术集成和降低晶圆成本的可能性而受到关注。在本研究中,将基于电荷的对称掺杂双栅模型(SDDGM)应用于新一代finfet晶体管,展示了该模型在所有工作区域和不同温度下描述晶体管行为的可能性。对n型和p型三种体finfet进行了建模。在工作温度从25°C到175°C范围内,对所有工作区域的实测和模拟传输特性进行比较,只提取了8个参数,结果吻合良好。结果表明,该模型同样适用于芯片体finfet器件的电路仿真。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Charge based compact model for bulk FinFETs
Multiple-gate MOSFETs are widely recognized as the most promising nanometric transistors for end of roadmap integrated circuits. These devices have therefore a great potential for low voltage, low power analog and digital applications. FinFETs fabricated on bulk wafers gained attention due to the possibility of their integration with standard bulk CMOS technology and reduced wafer cost. In the present work, the charge based Symmetric Doped Double-Gate Model (SDDGM) is applied to this new generation of FinFETs transistors, showing the possibilities of this model to describe the transistor behavior in all operating regions and at different temperatures. Three types of bulk FinFETS were modeled, including N-type and P-type. Comparison between measured and modeled transfer characteristics in all regions of operation, and varying the operating temperature from 25°C to 175°C, gives a good agreement extracting only eight parameters. These results demonstrated that the model SDDGM is also suitable for using in circuit simulation of chips bulk FinFETs devices.
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