TC4钛合金表面CVD钨基复合涂层制备工艺及性能研究

2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME) Pub Date : 2020-05-01 DOI:10.1109/ICEDME50972.2020.00113

Long Wu, Jie Ma, Hongyi Li, Jianzhong Wei, Wen Cheng

{"title":"TC4钛合金表面CVD钨基复合涂层制备工艺及性能研究","authors":"Long Wu, Jie Ma, Hongyi Li, Jianzhong Wei, Wen Cheng","doi":"10.1109/ICEDME50972.2020.00113","DOIUrl":null,"url":null,"abstract":"This paper introduces the preparation method and performance study of chemical vapor deposition (CVD) tungsten composite coating on TC4 titanium alloy surface. The magnetron sputtering method is used to introduce an intermediate transition layer to avoid corrosion of the titanium substrate by the formation of oxides on the surface of the titanium alloy and HF formed by CVD. After the performance test, the binding force of the composite coating and the titanium substrate was improved, and the wear resistance and corrosion resistance of the titanium alloy surface were further improved.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Study on Preparation Process and Properties of CVD Tungsten Composite Coating on TC4 Titanium Alloy Surface\",\"authors\":\"Long Wu, Jie Ma, Hongyi Li, Jianzhong Wei, Wen Cheng\",\"doi\":\"10.1109/ICEDME50972.2020.00113\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper introduces the preparation method and performance study of chemical vapor deposition (CVD) tungsten composite coating on TC4 titanium alloy surface. The magnetron sputtering method is used to introduce an intermediate transition layer to avoid corrosion of the titanium substrate by the formation of oxides on the surface of the titanium alloy and HF formed by CVD. After the performance test, the binding force of the composite coating and the titanium substrate was improved, and the wear resistance and corrosion resistance of the titanium alloy surface were further improved.\",\"PeriodicalId\":155375,\"journal\":{\"name\":\"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)\",\"volume\":\"102 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEDME50972.2020.00113\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEDME50972.2020.00113","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

介绍了TC4钛合金表面化学气相沉积(CVD)钨复合涂层的制备方法及性能研究。采用磁控溅射法引入中间过渡层，通过在钛合金表面形成氧化物和CVD形成HF来避免钛基板的腐蚀。经过性能试验，复合涂层与钛基体的结合力提高，钛合金表面的耐磨性和耐腐蚀性进一步提高。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Study on Preparation Process and Properties of CVD Tungsten Composite Coating on TC4 Titanium Alloy Surface

This paper introduces the preparation method and performance study of chemical vapor deposition (CVD) tungsten composite coating on TC4 titanium alloy surface. The magnetron sputtering method is used to introduce an intermediate transition layer to avoid corrosion of the titanium substrate by the formation of oxides on the surface of the titanium alloy and HF formed by CVD. After the performance test, the binding force of the composite coating and the titanium substrate was improved, and the wear resistance and corrosion resistance of the titanium alloy surface were further improved.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)

自引率

0.00%

发文量