{"title":"金属介质等离子体波导的制备方法","authors":"M. Nezhad, S. Zamek, L. Pang, Y. Fainman","doi":"10.1117/12.768161","DOIUrl":null,"url":null,"abstract":"Different techniques for fabricating long-range plasmonic metallo-dielectric waveguides are discussed. The approaches depend strongly on the material system in use. Specific results are presented for SU8 and PDMS.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"51 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Fabrication approaches for metallo-dielectric plasmonic waveguides\",\"authors\":\"M. Nezhad, S. Zamek, L. Pang, Y. Fainman\",\"doi\":\"10.1117/12.768161\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Different techniques for fabricating long-range plasmonic metallo-dielectric waveguides are discussed. The approaches depend strongly on the material system in use. Specific results are presented for SU8 and PDMS.\",\"PeriodicalId\":130723,\"journal\":{\"name\":\"SPIE MOEMS-MEMS\",\"volume\":\"51 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-02-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE MOEMS-MEMS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.768161\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE MOEMS-MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.768161","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication approaches for metallo-dielectric plasmonic waveguides
Different techniques for fabricating long-range plasmonic metallo-dielectric waveguides are discussed. The approaches depend strongly on the material system in use. Specific results are presented for SU8 and PDMS.