微波等离子体在介质真空压力范围内的工作稳定性分析

S. V. Bordusov
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引用次数: 0

摘要

基于光学诊断技术,研制并测试了微波等离子体在介质真空压力范围内的工作稳定性。该技术的实质是将真空计模拟量输出信号与光电倍增管信号同时同步记录。在等离子体泵出过程中,从气体切断时刻到放电饥饿时刻进行记录。我们将不同等离子体产生模式下微波放电稳定性的研究数据与放电辉光特性的变化结果进行了比较。分析结果证明了该方法的可靠性和高信息性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Snap of microwave plasmatron operation stability within pressure range in medium vacuum
A snap of microwave plasmatron operation stability within the pressure range in medium vacuum was developed and tested on the basis of an optical diagnostics technique. The essence of the technique is simultaneous synchronous recording of the signal from the vacuum-gauge analog output and the signal from the photoelectric multiplying tube. Recording is carried out during plasmatron pumpout from the moment of gas cut-off to the moment of discharge starvation. We compared the data obtained during investigation of microwave discharge stability in different modes of plasma generation with the results of the snap of discharge glow properties. Such analysis proves the reliability and high informativity of the developed technique.
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