等离子体振荡的离子束聚焦。主要方程的建立及初步的理论研究

I. Levchenko
{"title":"等离子体振荡的离子束聚焦。主要方程的建立及初步的理论研究","authors":"I. Levchenko","doi":"10.1109/DEIV.2000.879074","DOIUrl":null,"url":null,"abstract":"A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.","PeriodicalId":429452,"journal":{"name":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ion beam focusing by means of plasma oscillations. The set of principal equations and preliminary theoretical studying\",\"authors\":\"I. Levchenko\",\"doi\":\"10.1109/DEIV.2000.879074\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.\",\"PeriodicalId\":429452,\"journal\":{\"name\":\"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DEIV.2000.879074\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DEIV.2000.879074","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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摘要

以前提出了一种新的表面结构形成方法,如规则的表面沟槽系统(I.G. Levchenko, 1999)。本文主要讨论了主方程组的描述,并从理论上研究了主方程组的若干问题。在研究无阻尼等离子体振荡中离子偏转的基础上,给出了表面结构形成的主要可能性。特别注意了边界条件。根据先前提出的两种沉积模式,即过渡模式和萃取模式,建立了两组方程和边界条件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ion beam focusing by means of plasma oscillations. The set of principal equations and preliminary theoretical studying
A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.
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