{"title":"等离子体振荡的离子束聚焦。主要方程的建立及初步的理论研究","authors":"I. Levchenko","doi":"10.1109/DEIV.2000.879074","DOIUrl":null,"url":null,"abstract":"A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.","PeriodicalId":429452,"journal":{"name":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ion beam focusing by means of plasma oscillations. The set of principal equations and preliminary theoretical studying\",\"authors\":\"I. Levchenko\",\"doi\":\"10.1109/DEIV.2000.879074\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.\",\"PeriodicalId\":429452,\"journal\":{\"name\":\"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DEIV.2000.879074\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DEIV.2000.879074","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ion beam focusing by means of plasma oscillations. The set of principal equations and preliminary theoretical studying
A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.