宽带频率粘度测量使用低TCF剪切模式谐振器组成的c轴倾斜尺度薄膜在厚切割石英板

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2017-07-26 DOI:10.1109/TRANSDUCERS.2017.7994497

Y. Yamakawa, K. Sano, R. Karasawa, T. Yanagitani

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引用次数: 1

摘要

为了研究液体的声速弛豫特性和粘弹性，需要在MHz到GHz范围内进行宽频率扫描。厚度剪切声学模式(TSM)粘度传感器，如QCM或FBAR，只能分别在MHz或GHz范围内工作。因此，在这项研究中，我们报道了一种新型的HBAR(高泛音体声谐振器)传感器，它可以在更宽的频率范围内工作。HBAR由生长在零TCF at切割石英晶体板上的c轴倾斜的ScAlN薄膜组成。测量了不同浓度甘油溶液的频移。结果表明，理论和实验数据均观察到液体粘度增大导致共振频率减小的趋势。

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Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate

In order to study relaxation characteristics of acoustic velocity and viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. Thickness shear acoustic mode (TSM) viscosity sensors such as QCM or FBAR can only operate at the MHz range or the GHz range, respectively. In this study, therefore, we report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. The HBAR consists of the c-axis tilted ScAlN film grown on a zero TCF AT-cut quartz crystal plate. Frequency shifts were measured for various concentration of glycerine solutions. As a result, the tendency of resonant frequency decreasing caused by liquid viscosity increasing is observed in both theoretical and experimental data.

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2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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