磨削过程的msf误差预防策略

M. Pohl, U. Bielke, R. Boerret, R. Rascher, Olga Kukso
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引用次数: 3

摘要

研究了精密光学元件制造过程中制造参数与中频误差之间的关系。这第三出版物的重点是避免策略和产生机制的中空间频率误差的磨削过程。目的是了解中空间频率误差的产生机制,避免其在制造过程中出现。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MSF-error prevention strategies for the grinding process
This research is focused on the link between manufacturing parameters and the resulting mid-spatial frequency error in the manufacturing process of precision optics. This third publication focuses on strategies of avoidance and generation mechanisms of the mid-spatial frequency errors from the grinding process. The Goal is to understand the generation mechanisms of the mid-spatial frequency errors and avoid their appearance in the manufacturing process.
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