利用UHV-MBE-TEM系统研究锗纳米颗粒的结构

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI:10.1109/IMNC.1999.797517

Y. Wu, M. Takeguchi, K. Furuya

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引用次数: 0

摘要

将直径小于4 nm的Ge纳米颗粒沉积在Si TEM样品上，并使用UHV-MBE-TEM系统直接转移到TEM中。一些纳米颗粒的结构与金刚石结构不同。在HRTEM观察过程中，一些锗纳米晶体甚至变成非晶态，然后波动。

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HRTEM study on the structure of Ge nanoparticles by using a UHV-MBE-TEM system

Ge nanoparticles smaller than 4 nm in diameter were deposited on Si TEM samples and directly transferred into TEM using a UHV-MBE-TEM system. The structure of some nanoparticles was different from diamond structure. Some Ge nanocrystals even become amorphous and then fluctuate during HRTEM observation.

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Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference

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