低温共烧陶瓷体系的微波表征

S. Vasudevan, A. Shaikh
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引用次数: 17

摘要

低温共烧陶瓷(LTCC)是一种多层电子封装技术,具有将电阻、电容器和电感等无源元件集成到单片封装中的独特能力。LTCC可用于制造具有高密度互连和复杂形状埋地元件的电子电路。LTCC技术作为集成微电路的陶瓷封装技术,在微电子工业中得到了广泛的探索。Ferro的A6胶带介电常数为6,在10 GHz时微波损耗<0.17 dB/in。预计在不久的将来,高频(GHz范围)音视频传输应用将迅速扩展。用于高频应用的微电子封装需要在微波频率范围内具有高导电性的导电材料和低损耗的介电材料。本文的目的是在微波频率范围内对铁A6 LTCC系统进行表征。采用环形谐振器设计对银、金和银、金混合导体体系的A6 LTCC封装的微波特性进行了表征。研究了峰烧温度、峰烧时间等工艺参数对LTCC系统微波特性的影响。研究了工艺参数对Q因子和微波损耗的影响。讨论了导体类型及其表面粗糙度对微波性能的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Microwave characterization of low temperature cofired ceramic system
Low Temperature Cofired Ceramic (LTCC) is a multilayer electronic packaging technology and has a unique ability to integrate passive components such as resistors, capacitors and inductors in a monolithic package. The LTCC can be used to make electronic circuits with high density interconnects and complex shape buried components. LTCC Technology has been extensively explored in the microelectronics industry as a ceramic packaging technology for integrated microcircuits. Ferro's A6 tape has a dielectric constant of 6 and low microwave losses of <0.17 dB/in at 10 GHz. The high frequency (GHz range) audio and video transmission application is expected to expand very rapidly in the near future. Microelectronic packages for high frequency application require conductive materials with high conductivity and dielectrics with low losses at microwave frequency range. The objective of the paper is to characterize the Ferro A6 LTCC system in the microwave frequency range. Ring resonator designs were used to characterize microwave properties of A6 LTCC packages with Ag, Au and Ag, Au mixed conductor systems. The effect of processing parameters such as peak firing temperature and time on microwave characteristics of LTCC system was studied. The effect of processing parameters on Q factor and microwave losses were studied and presented. The effect of conductor type and its surface roughness on microwave properties is also presented.
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