基于TCAD器件仿真的高压CMOS双极ESD电源钳

P. Běťák
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摘要

本文提出了一种在高压CMOS技术中形成双极ESD电源箝位的具体方法。CMOS技术不能使用高效的双极结构,只能使用寄生结构。本文介绍了一种具有较高保持电压的功能性ESD电源钳。较高的保持电压对于电源钳是非常必要的。在TCAD器件模拟器中形成并模拟了该结构,并在高压CMOS工艺中制造了该结构。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Bipolar ESD power clamp in high voltage CMOS based on TCAD device simulation
The paper contributes a specific way to form bipolar ESD power clamp in high voltage CMOS technologies. The CMOS technology cannot use efficient bipolar structures but only the parasitic structures. Here, the functional ESD power clamp is introduced which has higher holding voltage than conventional structures in CMOS. The higher holding voltage is very necessary for power clamps. The structure were formed and simulated in TCAD device simulator and manufactured in high voltage CMOS process.
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