N. Dmitruk, O.I. Mayeva, S. Mamykin, O. Fursenko, O. Yastrubchak
{"title":"多层涂层特性对表面等离子体共振光电探测器效率的影响","authors":"N. Dmitruk, O.I. Mayeva, S. Mamykin, O. Fursenko, O. Yastrubchak","doi":"10.1109/SMICND.1998.733805","DOIUrl":null,"url":null,"abstract":"A double metal layer system on the diffraction grating was used for increasing of efficiency of surface plasmon resonance (SPR) GaAs based photodetector. The design of it is based on commonly used thin metal films with optical constants that can be realized by using standard thermal evaporation techniques. The performance of detectors has been controlled over the wide range of visible spectrum by variation both geometric and structural parameters of diffraction grating. The sensitivity of the structures to changes in the angle of incidence, the wavelength, both the coating nature and index, etc. are presented.","PeriodicalId":406922,"journal":{"name":"1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Influence of multilayer coating peculiarities on efficiency of surface plasmon resonance photodetector\",\"authors\":\"N. Dmitruk, O.I. Mayeva, S. Mamykin, O. Fursenko, O. Yastrubchak\",\"doi\":\"10.1109/SMICND.1998.733805\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A double metal layer system on the diffraction grating was used for increasing of efficiency of surface plasmon resonance (SPR) GaAs based photodetector. The design of it is based on commonly used thin metal films with optical constants that can be realized by using standard thermal evaporation techniques. The performance of detectors has been controlled over the wide range of visible spectrum by variation both geometric and structural parameters of diffraction grating. The sensitivity of the structures to changes in the angle of incidence, the wavelength, both the coating nature and index, etc. are presented.\",\"PeriodicalId\":406922,\"journal\":{\"name\":\"1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-10-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.1998.733805\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1998.733805","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of multilayer coating peculiarities on efficiency of surface plasmon resonance photodetector
A double metal layer system on the diffraction grating was used for increasing of efficiency of surface plasmon resonance (SPR) GaAs based photodetector. The design of it is based on commonly used thin metal films with optical constants that can be realized by using standard thermal evaporation techniques. The performance of detectors has been controlled over the wide range of visible spectrum by variation both geometric and structural parameters of diffraction grating. The sensitivity of the structures to changes in the angle of incidence, the wavelength, both the coating nature and index, etc. are presented.