大功率接触式射频MEMS开关用Ru电极的制备及热稳定性表征

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI:10.1109/NEMS.2013.6559746

Hongze Zhang, Zhihong Li

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引用次数: 0

摘要

本文介绍了用于微弹簧触点设计的大功率Ru- au触点射频MEMS开关的Ru电极的制备及其热稳定性。本文提出了一种双层剥离和应变释放层的新工艺，以获得具有优异光滑边缘的3000 Å Ti/Au/Ru电极，具有高功率处理和低损耗。此外，在400°C, 500°C和600°C下进行了1小时的热测试。SEM和EDX分析表明，该电极在400℃时具有良好的热稳定性，适合大功率处理。

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Fabrication and thermal stability characterization of Ru electrode used for high power contact RF MEMS switch

This paper presents the fabrication and thermal stability of the Ru electrode used for high power Ru-Au contact RF MEMS switch with microspring contact design. Here we develop a new process with bilayer lift-off and strain release layer to get the 3000 Å Ti/Au/Ru electrode with excellent smooth edge for high power handling and low loss. Furthermore, the thermal test at 400°C , 500°C and 600°C over 1 hour has been done. Investigation of the surface with SEM and EDX shows that the electrode has a good thermal stability at 400°C, which is proper for high power handling.

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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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