H. Pathangi, M. Stokhof, W. Knaepen, Varun Vaid, A. Mallik, B. T. Chan, N. Vandenbroeck, J. Maes, R. Gronheid
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Improved cost-effectiveness of the block co-polymer anneal process for DSA
This manuscript first presents a cost model to compare the cost of ownership of DSA and SAQP for a typical front end of line (FEoL) line patterning exercise. Then, we proceed to a feasibility study of using a vertical furnace to batch anneal the block co-polymer for DSA applications. We show that the defect performance of such a batch anneal process is comparable to the process of record anneal methods. This helps in increasing the cost benefit for DSA compared to the conventional multiple patterning approaches.
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