脉冲线放电的工业应用

Digest of Technical Papers. PPC-2003. 14th IEEE International Pulsed Power Conference (IEEE Cat. No.03CH37472) Pub Date : 2003-06-15 DOI:10.1109/PPC.2003.1277744

W. Jiang, T. Suzuki, H. Suematsu, K. Yatsui

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引用次数: 1

摘要

脉冲线放电在材料合成和加工中具有潜在的应用前景。我们正在从两个方向开发PWD材料应用，1)在PWD上高速气吹，2)用PWD沉积金属薄膜。在本文中，我们开发了一种高速充气装置，该装置能够在导线周围产生400托的瞬时环境气体压力，上升和下降时间在毫秒数量级。在氮气中观察了气泡防止击穿的效果。采用真空PWD法制备了铜薄膜。只有使用快速电容器组时，才能得到均匀的薄膜。

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Industrial applications of pulsed wire discharge

Pulsed wire discharge (PWD) has potential applications in material synthesis and processing. We are developing PWD for material applications in two directions, 1) applying high-speed gas puff on PWD and 2) depositing metal thin films by PWD. In this paper, we have developed a high-speed gas puff device that is capable of generating instantaneous ambient gas pressure of 400 Torr around the wire with rising and falling time on the order of milliseconds. The effect of breakdown prevention by the gas puff is observed in nitrogen gas. Copper thin films were obtained by PWD in vacuum. Uniform films were obtained only when fast capacitor bank was used.

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Digest of Technical Papers. PPC-2003. 14th IEEE International Pulsed Power Conference (IEEE Cat. No.03CH37472)

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