J. Milne, J. Dell, A. Keating, L. Schuler, L. Faraone
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Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators
Wide spectral tuning from 1620 nm to 2425 nm has been achieved in a MEMS-based tunable Fabry-Perot filter. Fixed-fixed beam actuators were used to extend the tuning beyond the inherent limit of a parallel plate actuator.