柔性OLED器件卷对卷多层热蒸发系统的研制

2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) Pub Date : 2018-07-01 DOI:10.23919/am-fpd.2018.8437386

Sin Kwon, Dongha Song, Hyuntae Kim, Moonyong Lee, Kyoohee Woo

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摘要

本文介绍了柔性OLED器件的卷对卷热蒸发设备的研制。在高真空条件下，柔性薄膜的连续运动通过所开发的卷对卷方法得到精确控制。并且，柔性OLED样品可以通过连续和顺序沉积有机/无机多层来制备。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of Roll-to-Roll Multi-layer Thermal Evaporation System for Flexible OLED Devices

This paper presents the development of roll-to-roll thermal evaporation equipment for flexible OLED devices. Under high vacuum conditions, the continuous movement of the flexible film was precisely controlled by the developed roll-to-roll method. And, it has been shown that flexible OLED samples can be fabricated by continuously and sequentially depositing organic/inorganic multi layers.

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来源期刊

2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)

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