Scanning Electron Microscope Calibration with SE2 and Inlens Detectors

In this paper, we proposed an ideal that calibration in the scanning electron microscope (SEM) with SE2 detector and Inlens detector. The parameters (intrinsic and extrinsic) were both achieved. This approach required rotation and translation of the chessboard calibration to obtain multi-images. Experiments were realized by varying the orientation and the position of chessboard pattern from different work distance (WD). It can be seen from the calibration results that the SE2 detector and the Inlens detector have different overall average pixels at different work distances. By comparing the calibration results, it was found that the two detectors had close pixel errors when the work distance was between 6.4mm and 6.5mm. The results show that the calibration approach was accurate and efficient.