Precision Engineering Measurements and Instrumentation最新文献_第5页

Alignment methods for partial compensating lens of aspheric testing in a non-null interferometer 非零干涉仪非球面检测部分补偿透镜的对准方法

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2181177

Tu Shi, Yongying Yang, Lei Zhang, Dong Liu, Yangjie Chen

{"title":"Alignment methods for partial compensating lens of aspheric testing in a non-null interferometer","authors":"Tu Shi, Yongying Yang, Lei Zhang, Dong Liu, Yangjie Chen","doi":"10.1117/12.2181177","DOIUrl":"https://doi.org/10.1117/12.2181177","url":null,"abstract":"Careful alignment of optical elements is essential in interferometric tests. Misalignments of the key element largely influence the testing accuracy. For aspheric figure error testing, non-null tests achieve more flexible and economical measurements than the null ones. However, retrace error is induced due to the violation of null configuration, making the alignment difficult. In aspheric partial compensation testing, the partial compensating lens (PCL) as the key component needs careful adjustment. The aplanat alignment method is effective for the PCL adjusting with high accuracy employing a removable lens, which combined with the PCL as an aplanat. But its structure is complex. After describing this method, a PCL computer-aided alignment (CAA) method is posed basing on system modeling in a ray tracing software. The structure is simplified with computer calculations. The PCL tilt and decentration are easily aligned with a plane and a standard spherical mirror respectively, according to linear relations with wavefront coma aberrations on the detector. Alignment of the PCL was implemented with these two methods in an aspheric partial compensation testing experimental apparatus. Adjustment and aspheric testing results were presented in order. The CAA method is a generalized approach with simpler structure, while the aplanat alignment method is easy to carry out and suitable for industrial application.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115952533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Refractive index of air for interferometric length measurements 干涉长度测量用空气折射率

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2181552

A. Abou-Zeid

引用次数: 2

Establishment of theoretical model and experimental equipment for researching on carbon contamination of EUV multi-layer mirror EUV多层反射镜碳污染研究理论模型及实验设备的建立

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2180670

Xuepeng Gong, Q. Lu, Guoqing Lu

{"title":"Establishment of theoretical model and experimental equipment for researching on carbon contamination of EUV multi-layer mirror","authors":"Xuepeng Gong, Q. Lu, Guoqing Lu","doi":"10.1117/12.2180670","DOIUrl":"https://doi.org/10.1117/12.2180670","url":null,"abstract":"Carbon contamination on extreme ultraviolet (EUV) multi-layer mirror is a seriously restrictive factor for lithography quality, chip output and life of lithography machine. In order to estimate the carbon contamination of EUV multi-layer and study the mechanism of carbon contamination deeply, an effective theoretical model of the carbon deposition on the multi-layer surface and experimental equipment for studying the carbon contamination are established. The theoretical model describes the transport of residual hydrocarbons to the irradiated area and the subsequent dissociation of the hydrocarbon by direct EUV radiation and secondary electron excitation, and indicates that the direct EUV radiation is the primary reason to dissociate the hydrocarbon, and makes the carbon deposited on the surface of multi-layer. Various carbon deposition states are simulated by the theoretical model, and some effective simulated results are obtained. Optical design scheme and structure design scheme of the experimental equipment are presented. The optical system includes two spherical multi-layer mirrors and a plane mirror multi-layer mirror. Ray trace and EUV intensity on sample are calculated, the light spot on sample is about Φ10mm and the EUV intensity is about 0.126mW/mm2. Structure of the experimental equipment includes adjusting mechanism of two spherical mirrors, rotary mechanism of plane mirror, alignment mechanism of EUV source, adjusting mechanism of sample, and so on. After testing, linear resolution and angle resolution of two spherical mirrors adjusting mechanism are 1μm and 5μrad respectively; linear displacement and linear resolution of sample adjusting mechanism are 50mm and 1μm respectively. The structure design scheme meets the requirement of the carbon contamination experiment.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126561771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Front end design of smartphone-based mobile health 基于智能手机的移动健康前端设计

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2180889

Changfan Zhang, Lingsong He, Zhiqiang Gao, Cong Ling, Jianhao Du

{"title":"Front end design of smartphone-based mobile health","authors":"Changfan Zhang, Lingsong He, Zhiqiang Gao, Cong Ling, Jianhao Du","doi":"10.1117/12.2180889","DOIUrl":"https://doi.org/10.1117/12.2180889","url":null,"abstract":"Mobile health has been a new trend all over the world with the rapid development of intelligent terminals and mobile internet. It can help patients monitor health in-house and is convenient for doctors to diagnose remotely. Smart-phone-based mobile health has big advantages in cost and data sharing. Front end design of it mainly focuses on two points: one is implementation of medical sensors aimed at measuring kinds of medical signal; another is acquisition of medical signal from sensors to smart phone. In this paper, the above two aspects were both discussed. First, medical sensor implementation was proposed to refer to mature measurement solutions with ECG (electrocardiograph) sensor design taken for example. And integrated chip using can simplify design. Then second, typical data acquisition architecture of smart phones, namely Bluetooth and MIC (microphone)-based architecture, were compared. Bluetooth architecture should be equipped with an acquisition card; MIC design uses sound card of smart phone instead. Smartphone-based virtual instrument app design corresponding to above acquisition architecture was discussed. In experiments, Bluetooth and MIC architecture were used to acquire blood pressure and ECG data respectively. The results showed that Bluetooth design can guarantee high accuracy during the acquisition and transmission process, and MIC design is competitive because of low cost and convenience.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124383331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Analyzing time walk error of leading trailing edge CFD of timing discrimination for Gaussian and Rayleigh distribution waveform 高斯分布和瑞利分布波形定时判别的CFD前尾缘时间行走误差分析

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2181701

Lijun Dong, Ke Liu, Lei Guo, Yinxiao Miao, Liwei Xin

引用次数: 1

Detection of wheel rim by immersion scan of phased array ultrasonic flaw testing 相控阵超声探伤浸泡扫描检测轮辋

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2182739

Y. Cai, Jianqiang Guo, Ze-yong Wang, Xiaorong Gao, Xiang-dong Jiang, Xi Li

引用次数: 0

Calibration of industrial CT using two forest-balls 用两个森林球校正工业CT

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2181284

Yu-shu Shi, Xu Song, S. Li, Wei Li, Qi Li, Siwen Chen, Fei Shen, Xiaoping Song, S. Gao

引用次数: 2

Super-resolution imaging based on virtual Airy spot 基于虚拟Airy点的超分辨率成像

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2180682

Zhengjun Liu, Cheng Guo, Junning Cui, Qun Wu

引用次数: 1

Design of CCD driver for quartz horizontal pendulum tiltmeter based on CPLD 基于CPLD的石英水平摆倾斜仪CCD驱动设计

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2083552

Wei-wei Zhan, Hai-yan Lu, Li Cai, Xiu Wang, Zhenyu Yang

引用次数: 0

Complex shape product tolerance and accuracy control method for virtual assembly 复杂形状产品公差与精度的虚拟装配控制方法

Precision Engineering Measurements and Instrumentation Pub Date : 2015-03-06 DOI: 10.1117/12.2181134

Huiping Ma, Yuanqiang Jin, Xiaoguang Zhang, H. Zhou

引用次数: 2