Monolithic integration of an electrically tunable ultrahigh-Q optomechanical device

Abstract

We demonstrate an electrically tunable ultrahigh-Q optomechanical device (mechanical Q~2.76×105) for the mechanical mode at 100.32 MHz by monolithically integrating an on-chip lithium niobate microresonator (optical Q~107) with a pair of in-plane microelectrodes.