Thin-film processing of “exotic” phase-change and ferroelectric materials for IoT applications

Abstract

We will report our development results of phase-change and ferroelectric thin film processing technologies including sputtering, MOCVD and plasma etching as well as manufacturing processes for PCRAM, FRAM and MEMS/Sensor device applications. Thin-film functional material such as phase-change materials and ferroelectric materials have been utilized to form advanced semiconductor and electronic devices for internet of things (IoT) solutions. We are confident our manufacturing technologies for these materials and devices will contribute to realizing next generation Smart Society.