High-Q silicon microsphere whispering gallery mode resonator fabricated by laser induced in-fiber capillary instability

Abstract

A method of fabricating silicon microsphere resonators feathered high quality factor whispering gallery modes of ∼ 0.8 × 10⁶ is demonstrated. We fabricate the silicon microspheres from silica-cladding/silicon-core fiber based on the CO2 laser induced in-fiber capillary instability phenomenon.