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A Study on the Ozone Reduction of Plasma Devices by Catalyst Method

Journal of The Korean Institute of Electrical and Electronic Material Engineers Pub Date : 2021-01-01 DOI:10.4313/JKEM.2021.34.1.56
Sin Young Jeon, Dongjun Kim, Jong-Yeop Kim, J. Kwon, Yong-min Jeon, Gye Ryung Do, Seong-eui Lee
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催化法等离子体器件臭氧还原的研究
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Journal of The Korean Institute of Electrical and Electronic Material Engineers
Journal of The Korean Institute of Electrical and Electronic Material Engineers
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