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Near-threshold sputter yields of ruthenium under argon and nitrogen ion bombardment

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Pub Date : 2019-11-01 DOI:10.1016/J.NIMB.2018.10.001
P. Phadke, J. M. Sturm, R. V. D. van de Kruijs, F. Bijkerk
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氩和氮离子轰击下钌的近阈值溅射产率
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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