Design and Analysis of Micro-Opto-Mechanical System Cantilever Integrated with Photonics Waveguide for Pressure Sensing Applications

Sensor Letters Pub Date : 2020-01-01 DOI:10.1166/sl.2020.4178

Veer Chandra, Rakesh Ranjan

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Abstract

In this work, the pressure sensing approach based on the Micro-Opto-Mechanical System (MOMS) cantilever integrated with waveguide structure has been explored. The MOMS based photonic sensors are drawing attention because of their high sensing capabilities. In the design of MOMS based cantilever pressure sensor, mainly two different waveguide structures, Rib and Slot waveguides have been considered. The deviation in light intensity at the output of the waveguide structure is mainly used to analyze the amount of exerted pressure at the free-end of cantilever. Using the different waveguide parameters such as, effective mode area, light intensity variations, etc., the performance comparison between Rib and Slot waveguides have been done. The relationship between the normalized light intensity at the waveguide output corresponding to the applied pressure has been established from the relationship between the deflection versus pressure and normalized intensity versus deflection. It has been anticipated that the performance of pressure sensor using Slot waveguide is significantly better than the Rib waveguide for some application.

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用于压力传感的光子波导微光机械系统悬臂梁的设计与分析

本文研究了基于微光机械系统悬臂梁与波导结构集成的压力传感方法。基于mom的光子传感器以其高传感能力而备受关注。在基于mom的悬臂式压力传感器的设计中，主要考虑了肋波导和槽波导两种不同的波导结构。光强在波导结构输出端的偏差主要用于分析悬臂梁自由端施加的压力。利用不同的波导参数，如有效模面积、光强变化等，对肋波导和槽波导的性能进行了比较。从偏转与压力的关系和归一化强度与偏转的关系，建立了波导输出处对应于施加压力的归一化光强之间的关系。研究表明，在某些应用中，采用槽波导的压力传感器的性能明显优于肋波导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensor Letters 工程技术-电化学

自引率

0.00%

发文量

审稿时长

6 months

期刊介绍： The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.