Fabrication and characteristic evaluation of sub-micron gap liquid chromatography micro chip

Abstract

We proposed a fabrication method of a sub-micron gap liquid chromatography micro chip by Silicon micromachining technology and performed a principle confirmation using this chip. This paper shows the fabrication process of the sub-micron gap in the flow channel which is made by the micro-pillar array formation by Silicon micromachining technology, and the deposition of poly-Si and successive thermal oxidation. It has become possible to fabricate the sub-micron order gap and control the gaps by the proposed method. Next, we deposited the ODS (octadecylsily) in the flow channel. Finally, using this chip, we performed the principle confirmation experiment of ODS deposition effect by injecting lysozyme into the flow channel. As the result, it was confirmed that the proposed method has the possibility of the separation analysis of biological samples.