Exergetic Analysis Air Preparation System with Heat Exchanger

Abstract

In this work using an extertological method of thermodynamic analysis of the air preparation and filtration system in clean rooms of microelectronics have been carried out.In this article two systems have been used: a direct flow system and using a heat exchanger system. In this account the exergy efficiency for the schemes under consideration and exergy losses in its main elements has been made. The schemes of exergy flows and their losses for the research system of the air preparation system for warm and cold seasons of the year have been obtained.The analysis of exergy loss allows choosing the most optimal air preparation scheme for clean rooms of microelectronics depending on the climatic conditions of natural-technical geosystem.