Influence of concentration of different chemical precursors on the physical properties of Cr2O3 thin films elaborated via pneumatic spray

IF 1.3 4区化学 Q3 CHEMISTRY, MULTIDISCIPLINARY

Main Group Chemistry Pub Date : 2022-03-20 DOI:10.3233/mgc-210137

Bothaina Saadi, S. Rahmane, Mouloud Laidoudi, Aicha Kater

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Abstract

In this paper, Cr2O3 thin films were synthesized successfully on glass substrates at 450 °C using a simple and low-cost homemade pneumatic spray system (SP) using two different precursors: chromium chloride and chromium nitrate. A systematic study of the influence of concentration of each precursor used for deposition on the structural, morphological, optical and electrical properties has investigated. The XRDresults show that the Cr2O3 films prepared with chromium chloride are polycrystalline with rhombohedral structure and those prepared with low concentration of chromium nitrate have a poor crystallinity. Peaks associated with Cr and O elements are present in EDS analysis that confirm the composition of the films and SEM images revealed a uniform, homogeneous and well covered surface.The measured electrical conductivity was found in the order of 5(Ω.cm)–1. The average transmittance of the films deposited from chromium nitrate is in the range of 60 % and for the films deposited from chromium chloride, it reaches75 % in the visible region. These electrical and optical properties of Cr2O3 thin film ascribed to its wide band gap, are indeed required for optoelectronic devices especially for solar cell window.

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采用气喷法制备了不同化学前驱物浓度对Cr2O3薄膜物理性能的影响

本文以氯化铬和硝酸铬两种不同的前驱体为原料，采用简单、低成本的自制气动喷涂系统(SP)，在450℃的温度下成功地在玻璃衬底上合成了Cr2O3薄膜。系统地研究了用于沉积的每种前驱体的浓度对结构、形态、光学和电学性质的影响。xrd结果表明，用氯化铬制备的Cr2O3薄膜是具有菱形结构的多晶薄膜，而用低浓度硝酸铬制备的Cr2O3薄膜结晶度较差。在EDS分析中发现了与Cr和O元素相关的峰，这证实了薄膜的组成，SEM图像显示了均匀、均匀和覆盖良好的表面。测得的电导率为5(Ω.cm) -1。硝酸铬沉积膜的平均透过率在60%左右，氯化铬沉积膜在可见光区平均透过率达到75%。Cr2O3薄膜的这些电学和光学特性归因于其宽带隙，确实是光电器件特别是太阳能电池窗口所必需的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Main Group Chemistry 化学-化学综合

CiteScore

2.00

自引率

26.70%

发文量

审稿时长

>12 weeks

期刊介绍： Main Group Chemistry is intended to be a primary resource for all chemistry, engineering, biological, and materials researchers in both academia and in industry with an interest in the elements from the groups 1, 2, 12–18, lanthanides and actinides. The journal is committed to maintaining a high standard for its publications. This will be ensured by a rigorous peer-review process with most articles being reviewed by at least one editorial board member. Additionally, all manuscripts will be proofread and corrected by a dedicated copy editor located at the University of Kentucky.