Laser ablation for material processing

IF 1.1 4区 物理与天体物理 Q3 NUCLEAR SCIENCE & TECHNOLOGY
M. Cutroneo, V. Havránek, A. Macková, P. Malinský, L. Silipigni, P. Slepička, D. Fajstavr, L. Torrisi
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引用次数: 1

Abstract

The laser ablation is an established material processing for many applications in nanotechnology, materials science and biomedicine. The laser ablation can be carried out in vacuum, in air and in liquid. Laser ablation mechanisms and their products depend on laser fluence, wavelength, pulse duration, ablation environment as well as target composition, density, thickness, roughness. This contribution is addressed to laser ablation of solid targets with the aim of hot plasma generation and thin film deposition on substrates located in appropriate positions in vacuum and in air. In the first section is presented an example of forward and backward plasma accelerations using the sub-nanosecond laser at the PALS laboratory (Czech Republic) for pulsed laser deposition processing. In the second section is reported the use of a nanosecond laser coupled to a post-accelerating compact system employed at the INFN in Catania (Italy) to ablate germanium solid targets in vacuum and to deposit thin films on SiO2/Si substrates to modify their native features. The last section is focused on the use of the nanosecond laser at the Tandetron laboratory (Czech Republic) employed for pulsed laser deposition and laser-induced backward transfer processing in vacuum and in air.
材料加工用激光烧蚀
激光烧蚀在纳米技术、材料科学和生物医学等领域有着广泛的应用。激光烧蚀可以在真空、空气和液体中进行。激光烧蚀机理及其产物取决于激光能量、波长、脉冲持续时间、烧蚀环境以及靶的成分、密度、厚度、粗糙度。这一贡献是针对固体目标的激光烧蚀,目的是在真空和空气中适当位置的基板上产生热等离子体和薄膜沉积。在第一部分中,介绍了在捷克PALS实验室使用亚纳秒激光器进行脉冲激光沉积处理的向前和向后等离子体加速的例子。在第二部分中,报告了在卡塔尼亚(意大利)的INFN使用纳秒激光耦合后加速紧凑系统在真空中烧蚀锗固体目标并在SiO2/Si衬底上沉积薄膜以改变其固有特征。最后一节重点介绍了捷克坦德创实验室在真空和空气中用于脉冲激光沉积和激光诱导逆向转移处理的纳秒激光器的使用。
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来源期刊
CiteScore
1.60
自引率
20.00%
发文量
107
审稿时长
4 months
期刊介绍: The Journal covers a wide range of topics under radiation and plasma sciences. The range of contributions encompasses: radiation physics; radiochemistry, radiobiology and physical effects of medical irradiation, including research on radiative cell degeneration; optical, electrical and mechanical effects of radiation, and their secondary effects such as diffusion and particle emission from surfaces; plasma techniques and plasma phenomena. On plasma science the Journal covers all areas of fusion, space and low temperature plasmas.
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