On the Linearity of BST Thin Film Bulk Acoustic Resonators

Abstract

Preliminary measurement results on the linearity of intrinsically switchable BST thin film bulk acoustic resonators (FBARs) are presented. Ferroelectric BST possesses electricfield-piezoelectricity, or electrostriction, which is employed to design intrinsically switchable BST FBARs. The linearity of these switchable resonators is an important factor for designing intrinsically switchable filters. The linearity of a single resonator is compared with two cascaded doubled size BST resonators. Third-order intercept point (IP3) measurement is performed, demonstrating the input IP3 improvement from 39 dBm to 43 dBm.